摘要：通过冷等静压技术制备ZrO2陶瓷生坯，并利用脉冲激光在陶瓷生坯表面制备微织构沟槽。探究激光参数对表面微织构质量的影响，并研究烧蚀区域的热影响区和激光烧蚀表面的微观形态变化。实验结果表明：通过激光加工可以在ZrO2陶瓷生坯表面加工出深度30-50μm、宽度15-50μm质量较好的微织构沟槽；激光参数对表面加工质量有较大的影响，激光频率低于40Hz、功率低于6W和扫描速度高于200mm/s能够获得较好的表面质量；当激光频率高于60Hz、功率高于10W和扫描速度低于150mm/s时，在激光烧蚀表面容易形成烧蚀层，分析得知烧蚀层是由于在激光高温照射下ZrO2颗粒的熔化和再凝固形成的。

关键词：陶瓷生坯；激光加工；表面质量；烧蚀微观形貌

中图分类号：TG174.4；TH161文献标志码：A

Fabrication of MicroScale Textured Grooves on Green ZrO2

Ceramics by Pulsed Laser Ablation

Liu Yayun，Liu Lili，Deng Jianxin，Wang Wei，Ge Dongliang，Zhang Guiliang

Abstract:The green ZrO2 ceramics are fabricated by cold isostatic pressing.Pulsed laser ablation is performed to fabricate microscale textured grooves on the surface of green ZrO2 ceramics. The influence of laser parameters on surface quality is studied. The heataffected zone around the machined grooves and micro morphology of laserirradiated surface are investigated. The results show that microscale textured grooves with a width of 3050μm and a depth of 1550μm on the green ZrO2 ceramic surfaces are successfully fabricated by pulsed laser ablation. The laser parameters has a profound influence on the surface quality of microscale textured grooves.Better surface quality could be obtained with frequency below 40 Hz，power below 6 W，and scanning velocity above 200 mm/s. A sintering layer is found on the laserirradiated surfaces when frequency is above 60 Hz，power is above 10 W，and scanning velocity is below 150 mm/s. Analysis of this sintering layer revealed clear melting and resolidification of ZrO2 particles.

Keywords:green ceramics；laser machining；surface quality；micromorphology of laser ablation