摘要：DLC涂层可有效降低硬质合金刀具切削过程中的摩擦系数和切削力，使用等离子增强化学气相沉积的方法在硬质合金（YG8）基体和Si(100)表面沉积SiC/DLC涂层，其中，C2H2和H2流量比分别为3:0、2:1、1:1、1:2和1:3。测试了Si(100)表面SiC/DLC涂层的厚度、生长形貌、sp3键的含量，并对硬质合金表面SiC/DLC涂层的硬度、膜基结合力和摩擦系数进行了全面分析。结果表明，SiC/DLC涂层均为非晶态形貌，随着H2流量的增加，涂层厚度不断下降；当C2H2/H2=1:1时，涂层的sp3键的比例最大，并达到41.0%，且具有较低的摩擦系数；涂层的硬度和弹性模量随着H2流量的增加而降低；C2H2/H2=1:3时，涂层表现出最佳的膜基结合力。

关键词：SiC/DLC；硬质合金；硬度；摩擦系数

中图分类号：TG154.5文献标志码：A

Structure and Properties of SiC/DLC Coatings Deposited on

WCCo Cemented Carbides

Du Hao，Chen ning，Hu Hengning，Li Bo，Zhou Tong，Zhao Haibo

Abstract:DLC coatings are used to decrease the friction coefficient and cutting force during machining.In this paper，SiC/DLC coatings were deposited on WCCo cemented carbides(YG8) and Si(100) substrates by a PECVD method，during which C2H2/H2 ratios under 3:0，2:1，1:1，1:2 and 1:3 were introduced into the chamber.The thickness，morphology，sp3 content，hardness，adhesion and friction coefficient of the asdeposited coatings were tested，respectively.As a result，all DLC coatings showed amorphous morphology，however，the thickness of the coatings decreased with H2 flow ratio increased.The sp3 content was tested to reach 41.0% when the C2H2/H2 was 1:1，and the low friction coefficient was found.The hardness and elastic modulus decreased with H2 flow ratio increased.The coating showed best adhesion under the flow ratio of C2H2/H2=1:3.

Keywords:SiC/DLC；cemented carbides；hardness；friction coefficient