摘要：杠杆触针扫描位移传感器是触针轮廓仪的关键装置，其测杆机构动态特性是保证触针轮廓仪测量精度和测量速度的基础。本文提出一种传感器测杆机构优化设计的方法：建立测杆机构动力学模型，基于有限元分析方法和触针式轮廓仪校准规范建立传感器测杆机构动态特性优化目标函数；基于神经网络算法建立测杆机构结构参数与目标函数的映射关系，利用遗传算法对目标函数进行求解，获取结构参数设计最优解；对优化后的测杆机构进行仿真，通过优化设计前后对比试验验证该优化方法的有效性。该方法对改善传感器动态响应特性、抑制测杆机构针尖飞行现象、提高轮廓仪传感器测量精度和测量效率具有重大意义。

关键词：触针扫描轮廓仪；动态特性；针尖飞行；测杆机构；遗传算法

中图分类号：TG806；TH702文献标志码：A

Optimization Design of Dynamic Characteristics of Stylus Scanning

Sensor Rod Mechanism Based on Genetic Algorithm

Hu Zhuo，Liu Xiaojun，Yu Defeng，Yang Wengjun

Abstract:Lever contact lens scanning displacement sensor is the key device of the stylus profiler.The dynamic characteristics of the rod mechanism is the basis to ensure the stylus profiler measurement accuracy and measurement speed.A sensor rod design optimization method is presented.Firstly，the dynamic model of the measuring rod mechanism is established，and the objective function of the dynamic characteristic of the sensor rod mechanism is established based on the finite element analysis method and the stylus profiler calibration standard.Then the neural network algorithm is used to establish the mapping relationship between the structural parameters of the rod mechanism and the objective function.The genetic algorithm is used to solve the objective function and obtain the optimal solution of the structural parameter design.Finally，the optimized rod mechanism is simulated，and the effectiveness of the optimization method is verified by optimizing the design before and after the comparison experiment.The method has great significance to improve the dynamic response characteristics of the sensor，to suppress the tip flight of the rod mechanism，to improve the measurement accuracy and measurement efficiency of the profile sensor.

Keywords:stylus profiler；dynamic characteristics；tip flight；rod mechanism；genetic algorithm