电感测微仪测量系统的研制
2018-09-21
作者：汪健，鲍文慧，张润，于连栋
单位：合肥工业大学
摘要：本文分析了国内外电感测微仪测头和测量电路研究现状，利用瑞士TESA公司的标准半桥电感测头作为传感器，设计了应用直接数字频率合成芯片搭建的正弦信号发生电路、交流信号放大电路、带通滤波电路、相敏检波电路、采集电路、单片机电路和人机交互电路，并编写程序，研制了一套电感测微仪测量系统。试验证明，本系统具有较高的测量精度且性能稳定。
关键词：电感测微仪；信号发生电路；相敏检波
中图分类号：TG806；TH711文献标志码：A
Design of Inductance Micrometer Circuit System
Wang Jian，Bao Wenhui，Zhang Run，Yu Liandong
Abstract:Based on the analysis current development of the inductance micrometer at home and abroad，against the problems of the domestic existing system，standard TESA halfbridge probes is used as the sensor，sine wave generating circuit is designed based on the direct digital frequency synthesizer，AC signal amplifying circuit，bandpass filtering circuit，phase sensitive detection circuit，AD acquisition circuit，MCU circuit and interactive circuit，the software system is designed and an inductance micrometer measuring and digital display system is developed.Finally，experiments show that the system has high accuracy and stable performance.
Keywords:inductance micrometer；DDS；phase sensitivity detection