大口径光学元件透反射检测调整工装的研制与分析
2018-06-20
作者：鱼胜利，周建勋，肖虹
单位:中国工程物理研究院机械制造工艺研究所
摘要：为了检测光学元件面形精度和波前功率谱密度，研制开发了一套具备透射和反射检测功能的检测调整工装。该调整工装把光学元件及其旋转板、支撑座的重量通过连接板和杆端球面联结器传递到基座上，俯仰调节机构和偏摆调节机构只起调节作用而不需承受上述重量的影响，增加了姿态调节时的便捷性和稳定性。介绍了调整工装的结构设计，对调整工装的运动仿真、模态及稳定性进行了分析。使用该工装测量的结果为，410mm×410mm的大口径光学元件反射检测的PV为2.17μm，透射检测的PSD1为3.84nm，与已知测量结果的标准KDP晶体基本相同，说明该透反射检测调整工装测量结果真实可靠。
关键词：大口径光学元件；检测调整工装；俯仰调节；偏摆调节
中图分类号：TH161+.14；TH162文献标志码：A
Development and Analysis of Adjusting Tool for Transmission and Reflectance Detection of Large Aperture Optical Element
Yu Shengli，Zhou Jianxun，Xiao hong
Abstract:In order to detect the optical element surface precision and the wavefront power spectral density，a set of detection tool with the transmission and reflection detection function is developed.The adjusting tool transfers the weight of the optical element，rotating plate and the support base together to the base through the connecting plate and the rod end spherical joint.The pithing adjusting mechanism and the yaw adjusting mechanism act only for adjusting without bearing the weight.The structural design of the adjusting tool is introduced，and the motion simulation，modal and stability of the adjusting tool are analyzed.The measurement results show that the 410mm×410mm large aperture optical element reflect the PV of 2.17μm and the transmittance of the PSD1 of 3.84nm，which is substantially the same as the standard KDP crystal of the known measurement results.The results show that the measurement of the transflective reflectance measurement tool is reliable.
Keywords:large aperture optical element；detection adjustment tool；pitch adjustment；offset adjustment