硬脆材料微纳米压痕微尺度材料去除机理有限元仿真研究

2018-07-25

作者：杨亚鹏1，2，陈晓晓1，张亚2，张文武1 单位：1中国科学院宁波材料技术与工程研究所；2中北大学

摘要：基于LSDYNA有限元仿真平台对石英玻璃微纳米压痕加—卸载过程进行建模仿真研究。针对微纳米压痕仪的标准Berkovich压头进行建模，基于石英玻璃的本构模型，施加载荷与边界条件，采用局部细化技术进行网格划分，构建三维有限元模型。分析压头加—卸载时，压头与试件作用区域最大主应力场和等效应力场的分布，研究石英玻璃微纳米尺度的材料去除机理。对比压痕实验，验证有限元仿真的正确性和可靠性。

关键词：石英玻璃；微纳米压痕；应力场；材料去除机理

中图分类号：TG115.6+3；TH161.3文献标志码：A

Finite Element Simulation Study on Micro Scale Materials Removal Mechanism Micro Nano Indentation of Hard and Brittle Materials

Yang Yapeng，Chen Xiaoxiao，Zhang Ya，Zhang Wenwu

Abstract:Based on the LSDYNA finite element simulation platform，modeling and simulation of micro nano indentation loading and unloading process of quartz glass are conducted.The standard Berkovich micro nano indenter is modeled，and a theredimensional finite element model is constructed based on the constitutive model of quartz glass，imposed loads and boundary conditions.The mesh is divided by local refinement technique.The distributions of the maximum principal stress field and the equivalent stress field of the action zone between the indenter and test specimen during the indenter loading and unloading process are analyzed.The material removal mechanism of quartz glass on the micro and nano scale is studied.By comparing with the indentation test，the validity and reliability of the finite element simulation are verified.

Keywords:quartz glass；micro nano indentation；stress field；material removal mechanism