嵌入式薄膜热电偶测温刀具的设计
2019-02-18
作者：马辰卉，武文革，王昕宇，成云平，刘丽娟
单位：中北大学
摘要：设计了一种嵌入式薄膜热电偶的刀具，以实现在切削过程中对刀具瞬态温度的实时测量。以刀具的前刀面作为基底来镀制薄膜，通过磁控溅射法在刀具前刀面制备了Al2O3绝缘膜、NiCr/NiSi薄膜热电偶以及Si3N4保护膜，最终制成了可以进行切削加工并能够实时测量切削温度的刀具。文中主要介绍了电极NiCr薄膜、Al2O3绝缘膜的制作过程及一些相关性能的检测，随后利用SolidWorks和DEFORM3D对刀具进行了三维建模和切削过程的仿真模拟，得到了刀具的温度场分布。
关键词：切削温度；磁控溅射；薄膜热电偶
中图分类号：TG162.2 ；TH765.2+6文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.02.025
Design and Research of Embedded Thin Film Thermocouple
Temperature Measuring Tool
Ma Chenhui，Wu Wenge，Wang Xinyu，Cheng Yunping，Liu Lijuan
Abstract:An embedded thinfilm thermocouple tool to realize realtime measurement of transient temperature during cutting process is designed.By magnetron sputtering，Al2O3 insulation film，NiCr/NiSi film thermocouple and Si3N4 protective film on the tool rake face are prepared.Finally，cutting tools which can machine and measure cutting temperatures are made.In this paper，the fabrication of the electrode NiCr film and the Al2O3 insulation film and some related performance detections are mainly introduced.Then，by using SolidWorks and DEFORM3D to do the 3D modeling and the cutting process simulation，the temperature field distribution of the cutter is obtained.
Keywords:cutting temperature；magnetron sputtering；thinfilm thermocouple