W掺杂对CrAlN薄膜微观结构及力学性能的影响

2019-03-14

作者：邓玉娟1，王宇星1，2 单位：1衢州职业技术学院；2浙江工业大学

摘要：通过改变W靶电流，采用磁控溅射技术在M2工具钢表面制备不同W含量的CrAlWN薄膜，利用SEM、EDS、XRD、纳米压痕仪和摩擦磨损试验仪研究了不同W含量的CrAlWN梯度薄膜的微观结构、膜/基结合力、力学性能和摩擦磨损性能。结果表明：CrAlN和CrAlWN薄膜的表面呈颗粒状，W的掺杂未改变CrAlN薄膜原有的晶体结构；随着W的掺杂和含量提高，CrAlN薄膜的力学性能和摩擦性能均有显著提高。

关键词：磁控溅射；CrAlWN薄膜；微观结构；力学性能；摩擦磨损性能

中图分类号：TG174；TH162文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.03.023

Effect of W Content on Microstructure and Mechanical Properties of CrAlN Coatings

Deng Yujuan，Wang Yuxing

Abstract:CrAlN and CrAlWN coatings are deposited on M2 tool steel substrates by magnetron sputtering technique.The microstructure，adhesive strength，mechanical properties，tribological properties of coatings are studied by SEM，EDS，XRD，nanoindentation and pinondisk tribometer.The experimental results show that the surface of CrAlN and CrAlWN coatings is granular，CrAlN and CrAlWN coatings exhibit fcc structure，the tribological properties and mechanical properties are improved with the increase of W content.

Keywords:magnetron sputtering；CrAlWN coating；microstructure；mechanical property；tribological property