光栅读数头安装误差对光栅测量精度的影响
2019-03-14
作者：李强，王建华，尹培丽，张嘉霖，方靖
单位：西安工业大学
摘要：通过试验方法研究了光栅读数头安装误差对光栅测量系统测量精度的影响。采用单因素法定量分析了光栅读数头A、B、C、Z轴4个方向的安装误差对光栅测量精度的影响规律。试验表明：读数头安装误差对光栅细分精度产生直接影响，并且这4个方向的影响显著性不同，其中B轴方向最敏感。
关键词：光栅测量系统；安装误差；定量分析；细分精度
中图分类号：TG801；TH741文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.03.027
Influence of Readinghead Installation Error on Grating Measurement Accuracy
Li Qiang，Wang Jianhua，Yin Peili，Zhang Jialin，Fang Jing
Abstract:The influence of the installation error of the readinghead on the measurement accuracy of the grating measurement system is studied by experimental methods.The single factor method is used to quantitatively analyze the influence law of the installation error of the readinghead Aaxis，Baxis，Caxis and Zaxis on the measurement accuracy of the grating.The experiment shows that the installation error has a direct impact on the accuracy of the grating subdivision，and the effects of these four directions are significantly different，with the Baxis direction being the most sensitive.
Keywords:grating measurement system；installation error；quantitative analysis；subdivision accuracy