嵌入薄膜传感器切削力测量用刀具的结构设计
2019-03-14
作者：韩燕文，武文革，张云涛，成云平，刘丽娟
单位：中北大学
摘要：设计了一种嵌入薄膜传感器切削力测量用刀具模型。对刀柄通过铣槽、钻孔等方式加以改进优化，利用磁控溅射、光刻技术、扩散焊接等方法在45钢弹性薄片基底表面制备Ni80Cr20合金薄膜电阻栅，形成测力应变传感器并安装在刀柄表面。使用ABAQUS软件对模型进行力学仿真分析，结果表明：传感器电阻栅布置在弹性基底中心位置能有效地提高其灵敏度；改进刀具测力系统的输出电压，为初始刀柄输出电压的2.42倍，可以增加传感器输出值；相同条件下，传感器输出电压随弹性基底厚度的减小而增大。
关键词：结构设计；镍铬薄膜；切削力测量；传感器；有限元分析
中图分类号：TG174.4；TH161；TB34文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.03.028
Design and Optimization for Cutting Force Measurement Tool
Structure with Embedded Film Sensor
Han Yanwen，Wu Wenge，Zhang Yuntao，Cheng Yunping，Liu Lijuan
Abstract:A tool model for cutting force measurement with a thin film sensor embedded in the tool is designed.The tool shank is improved and optimized through milling，drilling，etc.By using methods like DC magnetron sputtering，photolithography and diffusion welding，the Ni80Cr20 alloy thin film resistance grid is prepared on the surface of the elastic sheet of 45 steel to form a force strain sensor and then is mounted on the surface of the tool shank.The ABAQUS software is used for mechanical simulation analysis of the model.The results show that the sensor resistance grid arranged at the center of the elastic substrate can effectively improve the sensitivity of the sensor.The output voltage of the improved tool force measuring system is 2.42 times of the output voltage of the initial tool holder，achieving the effect of increase the output value of the sensor.Under the same conditions，the sensor output voltage decreases with the increase of the thin substrate thickness.
Keywords:structural design；nickel chrome film；measurement of cutting force；sensor；finite element analysis