嵌入薄膜传感器的可换刀头车刀测力仪设计与分析
2019-04-23
作者：张云涛，武文革，韩燕文，成云平，刘丽娟
单位：中北大学
摘要：设计了一种嵌入薄膜传感器的可换刀头测力仪，用于测量车刀切削过程中的主切削力与进给力。将车刀的刀头与刀柄设计为分离式两段结构，通过法兰套筒将刀柄与不同形状的车刀刀头对接，实现刀头的可换性。利用直流磁控溅射、光刻技术等方法制备Ni80Cr20合金薄膜应变传感器，该传感器通过真空扩散焊接方式安装在靠近法兰一端的刀柄表面，靠近法兰一端的刀柄中间部分设计为多层台阶凹槽，从而提高传感器灵敏度。利用ABAQUS软件对模型进行静力学仿真，分别在刀尖处施加单向力和三向组合力，得到测力仪输出电压和施加的三向力系数为0.0113-0.0114mV/N，误差为5.4%-6.5%。对比并分析了输出电压与外力之间的关系，通过传感器的单轴拉伸试验得到传感器的电阻应变系数为1.68；在单向力拉伸作用下传感器的测量灵敏度为00037mV/N。
关键词：薄膜传感器；测力仪；可换刀头；扩散焊接
中图分类号：TG712；TH162；TP212文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.04.027
Design and Optimization of Tool Dynamometer for Replaceable Tool Bit
with Embedded Film Sensor
Zhang Yuntao，Wu Wenge，Han Yanwen，Cheng Yunping，Liu Lijuan
Abstract:A kind of tool dynamometer with embedded thin film sensors and replaceable tool bit is designed，which is used to measure the main cutting force and feed force in the cutting process.The tool bit and the shank of the turning tool are designed as a separate twostage structure，and the shank is docked with the tool bit of different shapes by the flange sleeve structure to realize the replace ability of the tool bit.The strain sensor of Ni80Cr20 alloy is prepared by means of DC magnetron sputtering and photo lithography.The sensor is mounted by vacuum diffusion welding on the surface of the shank near one end of the flange.The middle portion of the shank near one end of the flange is designed as a multistep groove to improve sensor sensitivity.The static simulation of the model is carried out by ABAQUS software，and the unidirectional force and the threeway combined force are applied to the tool tip respectively.The coefficient of the output voltage of the dynamometer and the simultaneous application of the threedirection force is obtained to be from 0.0113mV/N to 00114mV/N，and the error is between 5.4% and 6.5%.The relationship between output voltage and external force is compared and analyzed.Through the uniaxial tensile test of the sensor，the resistance strain coefficient of the sensor is found to be 168，and the measurement sensitivity of the sensor is 0.0037mV/N under unidirectional force stretching.
Keywords:film sensor；dynamometer；replaceable tool bit；diffusion welding