金刚石印压微孔成形原位图像检测技术
2019-05-20
作者：石广丰1，李安珂1，朱桂展1，史国权1，2
单位：1长春理工大学；2中国科学院苏州生物医学工程技术研究所
摘要：基于图像处理的原位检测方法，通过对采集的微孔图像进行滤波降噪、改进最大类间方差（Otsu）阈值分割、特征提取和圆形拟合等处理，快速输出加工微孔的半径尺寸，并通过像素标定结合加工试验来验证系统的准确性。结果表明：本文提出的图像检测方法可以满足金刚石印压成孔的检测要求，能快速准确地检测出微孔孔径尺寸，精度可达1.13μm。
关键词：金刚石印压；微孔；原位检测；图像处理
中图分类号：TG937；TP394.1文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.05.026
Insitu Image Detection Technology for Micropore Forming by Diamond Indentation
Shi Guangfeng，Li Anke，Zhu Guizhan，Shi Guoquan
Abstract:In order to improve the processing quality and obtain the micropore size，it is necessary to study a fast and accurate insitu detection method.An insitu detection approach based on image processing is proposed in this paper，which can quickly output the radius and center coordinates of the microhole by filtering the acquired microhole image and improving the maximum interclass variance (Otsu) threshold segmentation method，feature extraction，and circular fitting.The accuracy of the system is verified by pixel calibration combined with processing experiments and the results show that the image detection method in this paper can meet the requirements of micropore forming by diamond indentation and can quickly and accurately detect the radius of the microhole with the accuracy reaching 1.13μm.
Keywords:diamond indentation；micropore；insitu detection；image processing