基于电射流沉积的TiO2薄膜制备及其摩擦特性研究
2019-07-11
作者：张亮亮，邓建新，李学木，孙婕，鲁洋
单位：山东大学
摘要：采用电射流沉积技术在316L不锈钢基体上沉积二氧化钛（TiO2）薄膜，并对薄膜进行高温烧结处理；在无润滑条件下，对薄膜进行往复式摩擦磨损试验，研究了温度对薄膜晶相及形貌变化的影响及TiO2薄膜的摩擦学性能。结果表明：在电射流沉积条件为电源电压3.8~4.1kV、高度4mm、流量4μl/min时，可以制得均匀的TiO2薄膜；随着温度升高，TiO2晶体结构逐渐由锐钛相转变为金红石相；TiO2薄膜能有效提高316L不锈钢表面的减摩性能。
关键词：电射流沉积；TiO2薄膜；摩擦性能
中图分类号：TG174.4；TH140.7文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.07.003
Preparation and Friction Study of TiO2 Films Based on
Electrohydrodynamic Atomization Deposition
Zhang Liangliang，Deng Jianxin，Li Xuemu，Sun Jie，Lu Yang
Abstract:Titaniafilms(TiO2) are deposited on 316L steel by electrohydrodynamic atomization technology(EHDA).The coated samples are calcined at different temperatures.Friction and wear tests are carried out on the films without lubrication.The effects of calcination temperature on crystal phase and morphology of the films are studied.The tribological properties of the coated films are observed.The results showed that the uniform and dense film can be prepared by EHDA under the conditions of power supply voltage 3.8 to 4.1kV，height 4mm and flow rate 4 μl/min.The crystal phase of the films are gradually changed from the anataseTiO2 to the rutileTiO2 with increasing of calcination temperature.TiO2 films can improve friction and wear properties of 316L steel surface effectively.
Keywords:electrohydrodynamic atomization technology；TiO2 films；tribological properties