CVD金刚石微铣刀的复合加工工艺研究
2019-07-11
作者：马兰州，赵国龙，李亮，何宁，王茂
单位：南京航空航天大学
摘要：CVD金刚石具有高的硬度和耐磨性，是制备微铣刀的理想材料。传统的磨削加工制备CVD金刚石微铣刀存在加工效率低的问题。本文提出了一种以激光诱导金刚石石墨化与精密磨削相结合的复合加工工艺来制备CVD金刚石微铣刀的新方法。研究了激光参数对金刚石相变深度和分界线轮廓最大高度的影响，进一步分析了分界线轮廓最大高度对切削刃质量的影响。结果表明，随着单脉冲能量的增加，金刚石相变深度和分界线轮廓最大高度都增大；随着扫描速度的增加，二者都减小，并且减小分界线轮廓最大高度能够提高磨削后切削刃的质量。为了提高制备效率，提出了一种由粗加工和精加工结合的解决方案。通过使用优化后的加工参数，制备出切削刃钝圆半径2.3μm，刀尖圆弧半径3μm的CVD金刚石微铣刀。
关键词：CVD金刚石；激光诱导石墨化；分界线轮廓最大高度；精密磨削；微铣刀
中图分类号：TG714；TH162文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.07.010
Research on Hybrid Machining Process of CVD Diamond micromilling Tool
Ma Lanzhou，Zhao Guolong，Li Liang，He Ning，Wang Mao
Abstract:CVD diamond is a desirable material for fabricating micromilling tool due to its high hardness and wear resistance.However，the fabrication efficiency of CVD diamond micromilling tool by conventional grinding process is very low.In this paper，a novel hybrid machining process for fabricating CVD diamond micromilling tools by laser induced diamond graphitization combined with precision grinding is proposed.During this process，the effects of laser parameters on the phase transformation depth of the diamond，and the maximum peaktovalley height of the boundary contour are investigated.Furthermore，the influence of the maximum peaktovalley height of the boundary contour on the quality of the cutting edge is analysed.The results indicated that both the diamond phase transformation depth and the maximum peaktovalley height of the boundary contour increase with the increase of the single pulse energy，but decrease as the scanning speed increased.The quality of the cutting edge after grinding is greatly improved by reducing the maximum peaktovalley height of the boundary contour.In order to improve the fabrication efficiency，a solution consisted of roughing and finishing processes is proposed.By using the optimized processing parameters，a CVD diamond micromilling tool with the cutting edge radius of 2.3μm and tool tip radius of 3μm is fabricated.
Keywords:CVD diamond；laser induced graphitization；maximum peaktovalley height of the boundary contour；precision grinding；micromilling tool