三维显微光切法表面粗糙度的非接触测量技术

2019-07-11

作者：相江单位：合肥工业大学

摘要：基于三维视觉检测原理对三维显微光切法表面粗糙度非接触测量技术进行研究。使激光光线与被测工件表面相切，利用工业相机采集获取表面微观轮廓，采用图像处理技术恢复出微观轮廓的几何形貌。根据设计算法，由表面粗糙度评定算法得到表面粗糙度的Ra、Rz等评定指标。这种测量方法效率高，适用范围广，且非接触式测量可避免对工件表面的损坏。

关键词：表面粗糙度；非接触式测量；三维显微光切法

中图分类号：TG84；TH741.3文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.07.023

Noncontact Measurement Research of Surface Roughness by

Threedimensional Microscopic Light Cutting

Xiang Jiang

Abstract:Based on threedimensional vision detection，a noncontact measurement method of surface roughness is researched.Through the laser light cutting with workpiece，the microscopic contour of workpiece can be detected by industrial camera and the geometric appearance of microscopic contour in workpiece can be recovered by image processing.According to the designed algorithm，the criterion of surface roughness like Ra，Rz is obtained.This detection method can measure faster with wide range of applications and avoid mar for the workpiece in the measurement.

Keywords:surface roughness；noncontact measurement；threedimensional microscopic light cutting