结构光照明显微镜照明系统的设计与仿真
2019-07-11
作者：柴常春，闫红洲，罗健，张箎，黄连，刘晓军
单位：华中科技大学数字制造装备与技术国家重点实验室
摘要：结构光照明显微镜是一种结合结构照明技术与宽场成像原理实现表面形貌测量的新工具。为方便调节物面光强和照明视场大小，并保证结构光条纹的均匀性，基于科勒照明原理提出利用成品透镜与无限远物镜，并结合数字微镜阵列（DMD）设计结构光照明显微镜照明系统的方法。通过Zemax软件建立设计模型进行仿真分析，验证了该方法设计的结构光照明系统投射到物面光照的均匀性。
关键词：结构光照明显微镜；科勒照明；Zemax
中图分类号：TG802；TH702文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.07.024
Design and Simulation of Illumination System for Structured Illumination Microscope
Chai Changchun，Yan Hongzhou，Luo jian，Zhang Chi，Huang Lian，Liu Xiaojun
Abstract:Structured illumination microscope is a novel instrument combining the structured illumination with wide field imaging for measuring surface topography.In order to regulate the light intensity at specimen plane and the size of the illuminated field and ensure the homogeneity of the illumination pattern，a method based on Kohler illumination to design illumination system with stock lenses，infinity corrected objective and the digital micro mirror array (DMD)for structured illumination microscope is proposed.The optical system is designed in Zemax software to verify the illumination uniformity on the surface of the sample.
Keywords:structured illumination microscope；Kohler illumination；Zemax