基于QPD的二维角位移精密测量传感技术研究

2019-08-02

作者：范亚男，陈青山，刘洋，王猛单位：北京信息科技大学

摘要：为解决二维角位移高精度精密测量的问题，研究了一种基于QPD的二维角位移测量方法。以LED作为光源，低暗电流、高灵敏度的四象限光电探测器作为检测元件，采用光学杠杆式的测角方法形成测量系统。分析了光斑大小对测量结果的影响，并搭建高集成实验系统进行验证。测试实验结果表明：测角分辨力达到1″，在2mrad量程内，非线性度为0.18%，数据采集与传送延时为250μs。该方法可用于精密光机系统，以便高精度实时监测高速运动元件的二维角运动。

关键词：二维角位移；四象限光电探测器；LED；精密测量

中图分类号：TG806；TH712文献标志码：ADOI：10.3969/j.issn.1000-7008.2019.08.023

Research on 2D Angular Displacement Precision Measurement Sensing

Technology Based on QPD

Fan Yanan，Chen Qingshan，Liu Yang，Wang Meng

Abstract:In order to solve the problem of highprecision precision twodimensional angular displacement measurement，a twodimensional angular displacement measurement method based on QPD is studied.Using LED as the light source，low dark current highsensitivity fourquadrant detector as the detection component，an optical lever type angle measurement system is constructed.The influence of spot size on the measurement results is investigated.A highly integrated experiment setup is built to verify the method.The experiment results show that the angular resolution reaches 1″，the nonlinearity is 0.18%，and the data collect and transmission delay is less than 250μs within the 2 mrad range.The formed method and system can be applied in precision optomechanics devices for the high precision realtime monitoring of the 2D angular motion.

Keywords:2D angle precision measurement；four quadrant detector；LED；precision measurement