等离子体辅助激光织构化预处理增强TiAlN刀具涂层膜基结合强度的机理研究

2020-10-27

作者：孟祥峰，张克栋，郭旭红，武勇强，张靓单位：苏州大学

摘要：物理气相沉积（PVD）TiAlN涂层刀具在难加工材料高性能切削中有巨大的应用需求，而涂层膜基结合强度成为制约其高性能切削难加工材料的关键问题。为解决该问题，采用纳秒激光和等离子体刻蚀系统对硬质合金基体表面进行预处理，而后进行TiAlN涂层，最终获得传统涂层刀具（CCT）、激光织构化涂层刀具（LCT）、等离子体刻蚀涂层刀具（CECT）、等离子体辅助激光织构化涂层刀具（LECT）。分析织构化基体晶相结构、比表面积、表面能等材料特性和表面状态，并利用上述制备的涂层刀具进行划痕试验和干切削316奥氏体不锈钢试验。结果表明，通过基体表面等离子体辅助激光织构化预处理，可改善涂层膜基化学键合性能的差异，增加基体表面比表面积和表面能，改善膜基间物理结合和化学键合界面，进而提升TiAlN涂层膜基结合强度。与其他三种涂层刀具进行划痕试验与切削试验对比，进一步验证了LECT的涂层膜基结合强度最好。

关键词：等离子体辅助激光织构化；TiAlN涂层；膜基结合强度；物理/化学结合；磨损性能

中图分类号：TG712；TH117文献标志码：ADOI：10.3969/j.issn.1000-7008.2020.09.002

Study on Mechanism of Plasmaassisted Laser Texturing Pretreatment to

Enhance Bonding Strength of TiAlN Coated and Tool Substrate

Meng Xiangfeng，Zhang Kedong，Guo Xuhong，Wu Yongqiang，Zhang Liang

Abstract:Physical vapor deposition (PVD) TiAlN coated tools have huge application requirements in high-performance cutting of difficulttomachine materials，and the bonding strength of the coating film base has become a key issue restricting its highperformance cutting of difficulttomachine materials.In order to solve this problem，this article uses nanosecond laser and plasma etching system to pretreat the surface of the cemented carbide substrate，and then apply TiAlN coating.Finally，the conventional coating tool (CCT)，laser textured coating tool (LCT)，plasma etching coating tool (CECT) and plasma assisted laser textured coating tool (LECT) are obtained.The material properties and surface conditions such as the crystal structure，specific surface area，and surface energy of the textured matrix are analyzed，and the scratch test and dry cutting 316 austenitic stainless steel test are performed using the coating tool prepared above.The results show that the plasma surfaceassisted laser texturing pretreatment of the substrate can improve the difference in chemical bonding properties of the coating film substrate，increase the specific surface area and surface energy of the substrate surface，and improve the physical bonding and chemical bonding interface between the film substrates，improve the bonding strength of TiAlN coating.Comparing with the other three coating tools，the scratch test and cutting test further verify that LECT′s coating film substrate has the best bonding strength.

Keywords:plasmaassisted laser texturing；TiAlN coating；filmbased bonding strength；physical/chemical bonding；wear performance