Box-Behnken试验设计法分析激光诱导金刚石石墨化后材料去除深度研究
2020-10-19
作者：李振军，陈妮，李亮，仵洋，何宁
单位：南京航空航天大学
摘要：金刚石的加工制备一直以来被学术界和工业界高度关注。针对金刚石的高效去除方法——激光加工，研究激光参数对金刚石去除量的影响，并采用BoxBehnken试验设计法建立金刚石去除深度与各激光参数之间的拟合关系式，实现金刚石激光加工的可控去除及预测。
关键词：金刚石；激光加工；BoxBehnken试验；去除深度
中图分类号：TG669；TH140.7文献标志码：ADOI：10.3969/j.issn.1000-7008.2020.04.002
BoxBehnken Experimental Design Method is Used to Analyze Removal Depth of
Diamond After Laser Induced Graphitization
Li Zhenjun，Chen Ni，Li Liang，Wu Yang，He Ning
Abstract:The processing and preparation of diamond has been paid much attention by the academia and industry.In this paper，laser processing and a highefficiency removal method for diamond are used to study the influence of laser parameters on diamond removal，and BoxBehnken experimental design method is used to establish the fitting relationship between diamond removal depth and various laser parameters，so as to realize controllable removal and prediction of diamond laser processing.
Keywords:diamond；lasermachining；BoxBehnken experiment；ablation depth