先进复合物理气相沉积技术制备高性能硬质涂层

2020-10-22

作者：张权1，许雨翔1，王启民1，林海天2，李立升2 单位：1广东工业大学机电工程学院；2东莞市华升真空镀膜科技有限公司

摘要：现代切削技术的发展对涂层刀具提出了愈加严苛的使用要求，且不同的难加工材料需要不同的定制化切削方案。无论是采用电弧离子镀还是磁控溅射工艺，传统单一涂层刀具已不能满足高速干式切削的加工需求。通过电弧离子镀与磁控溅射复合技术，制备具有超晶格结构的纳米多层涂层，不仅可显著提升涂层的力学性能、高温抗氧化性以及抗磨损性能，还能克服单一沉积工艺的技术缺陷。通过回顾电弧/溅射复合沉积的发展历程，总结了国内外的相关研究成果以及产业化进展，并分析了复合沉积工艺对涂层力学性能与切削寿命的影响。

关键词：复合沉积；硬质涂层；多层结构

中图分类号：TG17；TH161.14文献标志码：ADOI：10.3969/j.issn.1000-7008.2020.07.001

Advanced Hybrid Physical Vapor Deposition Technology for

Highperformence Hard Coatings

Zhang Quan，Xu Yuxiang，Wang Qimin，Lin Haitian，Li Lisheng

Abstract:The development of modern cutting technology has imposed stringent requirements on coated tools，and different difficulttomachine materials require different customized cutting solutions.Traditional monolithic coated tools，deposited by individual cathodic arc evaporation or magnetron sputtering，are not suitable for the increasing demands of highspeed yet dry cutting.The application of hybrid arc ion plating/magnetron sputtering technique not only overcomes the inherent drawbacks of the individual deposition process，but also achieves nanomultilayer coatings with improved mechanical properties，excellent oxidation and wear resistances.In this paper，the development history of hybrid arc/sputtering deposition is briefly reviewed，and the related research and the industrialization progresses at home and abroad are summarized.Also，the effect of the deposition process on the mechanical properties and cutting life of the hybrid coating is analyzed.

Keywords:hybrid deposition；hard coating；multilayer architecture