摘要：利用多弧离子镀技术制备类金刚石膜，研究不同偏压频率对类金刚石膜组成和性能的影响。采用扫描电镜、拉曼光谱仪、X射线光电子能谱（XPS）和纳米压痕仪对类金刚石膜进行分析，结果表明：偏压频率对类金刚石沉积的膜厚没有影响，但沉积粒子团簇尺寸随着偏压频率的增大而减小；当偏压频率为3kHz时，沉积粒子团聚严重且颗粒较大，表面质量较差。经类金刚石膜拉曼光谱分析得出：低频时的ID/IG比高频时低，XPS结果进一步证明偏压低频沉积类金刚石膜的SP3含量高于高频区。纳米压痕测试结果表明，薄膜硬度相同时低频区优于高频区。相关结果为设计制备类金刚石膜提供了新的思路。

关键词：类金刚石；多弧离子镀；偏压频率；薄膜硬度

中图分类号：TG174.4；TH140.7文献标志码：ADOI：10.3969/j.issn.1000-7008.2021.07.008

Effect of Bias Frequency on Quality of Diamondlike Carbon Film

Zhu Jiacheng，Wu Jianbo，Vladimir A.Levchenko，Wang Shouguo

Abstract:The diamondlike carbon (DLC) films are prepared by multiarc ion plating，and the effects of bias frequency on the composition and properties of DLC films are studied.Scanning electron microscopy，Raman spectroscopy，Xray photoelectron spectroscopy (XPS) and nanoindentation are used to analyze the DLC films.The results show that the bias frequency has no effect on the film thickness，but the cluster size decreases with the increasing of bias.When the bias frequency is 3kHz，the agglomeration of the deposited particles is serious and the particles are larger，the surface quality is poorer.Raman spectrum analysis of DLC films shows that ID/IG is lower at low frequency than that at high frequency.XPS testing results further confirm that the content of SP3 of DLC films deposited at low bias frequency is higher than that at high frequency.Nanoindentation test results show that the hardness of DLC films deposited at low frequency is better than that at high frequency.The results provide a new idea for the design and preparation of diamondlike carbon films.

Keywords:diamondlike carbon；multi arc ion plating；bias frequency；film hardness