三维测头耦合分析与校正

2018-11-12

作者：郭强，黄强先，吴奎，陈丽娟，李瑞君，李红莉单位：合肥工业大学

摘要：基于微型迈克尔逊干涉原理和激光自准直原理构成的三维接触扫描测头，从机械结构误差分析了测头输出三路信号产生耦合的原因。为减小信号耦合对测量结果的影响，通过微纳米测量机三维定位工作台对测头三个坐标轴方向进行标定，最终采用四次多项式模型建立工作台位移和测头输出信号之间的关系。信号处理基于Labview软件实现，计算结果表明该模型误差在±30nm以内。

关键词：触发测头；机械机构；耦合分析；坐标测量机；测头标定；校正

中图分类号：TG801；TH822文献标志码：A

Coupling Analysis and Calibration of 3D Probe

Guo Qiang，Huang Qiangxian，Wu Kui，Chen Lijuan，Li Ruijun，Li Hongli

Abstract:Described a threedimensional contact scanning probe which based on the principle of microMichelson interference and laser autocollimator，the coupling of three axes is analyzed from mechanical structure error.In order to reduce the impact of signal coupling on the measurement，the threedimensional positioning table of the measuring machine is used to calibrate the three directions of the touch trigger probe.The quadratic polynomial model is used to establish the relationship between the worktable displacement and the probe output signal.The signal processing realized based on Labview software，the calculation results show that the error of the model is within±30nm.

Keywords:touch trigger probe；mechanical structure；coupling analysis；coordinate measuring machine；probe calibration；correction